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GFET-S11 (Die size 10 mm x 10 mm) - Processed in Clean Room Class 1000
· 150nm of Si3N4 deposited by LPCVD on Si
· Choose to measure sequentially or multiple devices at once
gas sensors
GFET-S11 for Sensing applications GFET GFET-S11 (Die size 10 mmGFET S11 (Die size 10 mm x 10 mm) Processed in Clean Room Class 1000 The GFET S11 chip from Graphenea provides 31 graphene devices with a van der Pauw (vdP) geometry, distributed in 3 different sizes. 3 vdPs have a 2x2mm2 footprint, 14 vdPs have a 500x500m2 footprint and 14 vdPs have a 125x125m2 footprint. These devices have an optimized geometry for 4 probe measurements in a vdP configuration. These varying graphene device dimensions allow