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This Asyst Technologies 9700-5819-01 Fan Filter Unit Controller CMS II Rev
The unit is missing components (see photos)
Part No: HV-PS8
47771: Pin Antenna PCII POLI S
Aera PI-98 Mass Flow Controller MFC Reseller Lot of 9 Working Surplus This Asyst Technologies 9700-5819-01 FanAera PI 98 Mass Flow Controller MFC Reseller Lot of 9 Working Surplus Part No: PI 98 May Require Calibration Reseller Lot of 9 Included Components Part No: FCPI980CBAXDIDJAA; 0190 34213; 250 SCCM, Cl2 (Qty. 1) Part No: FCPI980CBAXDIDJAA; 0190 34213; 300 SCCM, N2 (Qty. 1) Part No: FCPI980CBAXDIDJAA; 0190 34213; 275 SCCM, HBr (Qty. 1) Part No: FCPI981CBAXDIDJAA; 0190 34216; 5000 SCCM, O2 (Qty. 2) Part No: FCPI981CBAXDIDJAA; 0190 34216; 10000 SCCM, H2
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